Blank Cover Image

DAMAGE FORMATION IN SEMICONDUCTORS DURING MeV ION IMPLANTATION

Author(s):
Publication title:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
128
Pub. Year:
1989
Page(from):
593
Page(to):
598
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990012 [1558990011]
Language:
English
Call no.:
M23500/128
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings *DAMAGE GROWTH IN Si DURING SELF-ION IRRADIATION: A STUDY OF ION EFFECTS OEVER AN EXTENDED ENERGY RANGE

Holland, O. W., El-Ghor, M. K., White, C. W.

Materials Research Society
7 Conference Proceedings CHARACTERISTICS OF 56 MeV OXYGEN IMPLANTATION INTO Si AND III-V SEMICONDUCTORS

Pearton, S.J., Jalali, B., Poate, J.M., Fox, J.D., Kemper, K.W., Magee, C.W., Jones, K.S.

Materials Research Society
2 Conference Proceedings CAVITY FORMATION IN SIMOX STRUCTURES

El-Ghor, M. K., Pennycook, S. J., Sjoreen, T. P., White, C. W., Narayan, J.

Materials Research Society
8 Conference Proceedings ION BEAM SYNTHESIS OF IrSi3 BY 1-MeV Ir ION IMPLANTATION INTO Si(111)

Sjoreen, T. P., Hinneberg, H.-J.

MRS - Materials Research Society
3 Conference Proceedings CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON

El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J.

Materials Research Society
9 Conference Proceedings ION BEAM SYNTHESIS OF IrSi3 BY 1-MeV Ir ION IMPLANTATION INTO Si(111)

Sjoreen, T. P., Hinneberg, H.-J.

MRS - Materials Research Society
4 Conference Proceedings OXYGEN ION IMPLANTATION INTO GERMANIUM

Sjoreen, T. P., Ravindra, N. M., El-Ghor, M. K., Fathy, D.

Materials Research Society
10 Conference Proceedings Formation of Ferromagnetic FePt Nanoparticles by Ion Implantation

White, C.W., Withrow, S.P., Budai, J.D., Boatner, L.A., Sorge, K.D., Thompson, J.R., Beaty, K.S., Meldrum, A.

Materials Research Society
5 Conference Proceedings ION BEAM SYNTHESIS OF IrSi3 BY IMPLANTATION OF 2 MeV Ir IONS+

Sjoreen, T.P., Hinneberg, H.-J., Chisholm, M.F.

Materials Research Society
11 Conference Proceedings MESOTAXY LAYERS OF IrSi3 IN (111)Si FORMED BY MeV ION IMPLANTATION

Short, K. T., White, Alice E., Eaglesham, D. J., Jacobson, D. C., Poate, J. M.

Materials Research Society
6 Conference Proceedings THE ROLE OF IMPLANTATION DAMAGE IN THE PRODUCTION OF SILICON-ON-INSULATER FILMS BY CO-IMPLANTATION OF HE+ AND H+

Venezia, V.C., Haynes, T.E., Agarwal, A., Eaglesham, D.J., Holland, O.W., Weldon, M.K., Chabal, Y.J.

Electrochemical Society
12 Conference Proceedings The Effect of the Extra Ion on Residual Damage in MeV-Implanted Si

Libertino, S., Benton, J. L., Coffa, S., Jacobson, D. C., Eaglesham, D. J., Poate, J. M., Lavalle, M., Fuochi, P. G.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12