INFLUENCE OF THE IMPLANTED SPECIES ON THE RESIDUAL DAMAGE AFTER HOT IMPLANTS IN SILICON
- Author(s):
Calcagno, L. Spinella, C. Catania, M. Campisano, S.U. Foti, G. Ferla, G. Rimini, E. - Publication title:
- Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 128
- Pub. Year:
- 1989
- Page(from):
- 581
- Page(to):
- 586
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990012 [1558990011]
- Language:
- English
- Call no.:
- M23500/128
- Type:
- Conference Proceedings
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