Blank Cover Image

ION-ASSISTED REGROWTH OF DEPOSITED Si LAYERS MECHANISMS AND MORPHOLOGY

Author(s):
Priolo, F.
Spinella, C.
La Ferla, A.
Battaglia, A.
Rimini, E.
Ferla, G.
Carnera, A.
Gasparotto, A.
3 more
Publication title:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
128
Pub. Year:
1989
Page(from):
563
Page(to):
568
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990012 [1558990011]
Language:
English
Call no.:
M23500/128
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TEMPERATURE DEPENDENCE OF ION ASSISTED EPITAXIAL GROWTH OF CHEMICAL VAPOR DEPOSITED Si LAYERS

La Ferla, A., Rimini, E., Spinella, C., Ferla, G.

Materials Research Society
7 Conference Proceedings Er luminescence in Si: a critical balance between optical activity and pumping efficiency

Coffa, S., Priolo, F., Franzo, G., Bellani, V., Carnera, A., Spinella, C.

MRS - Materials Research Society
2 Conference Proceedings *DAMAGE ACCUMULATION AND ANNEALING IN ION IRRADIATED SILICON

Priolo, F., Battaglia, A., Spinella, C., Rimini E.

Materials Research Society
8 Conference Proceedings Structural Study of The Epitaxial Realignment of Polycrystalline Si Films onto Si Substrates

Benyaich F., Priolo F., Rimini E., Spinella C., Ward P.

Kluwer Academic Publishers
3 Conference Proceedings Ion-Assisted Nucleation in Amorphous Silicon

Battaglia A., Spinella C., Priolo F., Campisano U. S.

Kluwer Academic Publishers
9 Conference Proceedings Influence of the dislccation loops on the anomalous diffusion of Fe implanted into InP

Frigeri,C., Carnera,A., Fraboni,B., Gasparotto,A., Priolo,F., Camporese,A., Rossetto,G.

Trans Tech Publications
4 Conference Proceedings Ion Beam Processing of Chemical Vapor Deposited Silicon Layers

Campisano S. U., Spinella C., Priolo F.

Kluwer Academic Publishers
10 Conference Proceedings Dose and Doping Dependence of Damage Annealing in Fe MeV Implanted InP

Carnera, A., Fraboni, B., Gasparotto, A., Priolo, F., Camporese, A., Rossetto, G., Frigeri, C., Cassa, A.

MRS - Materials Research Society
5 Conference Proceedings Ion Assisted Nucleation in Amorphous Silicon: Mechanism and Theoretical Description

Spinella, C., Lombardo, S., Priolo, F., Campisano, S. U.

MRS - Materials Research Society
11 Conference Proceedings ERBIUM IMPLANTATION IN SILICON: A WAY TOWARDS Si-BASED OPTOELECTRONICS

Priolo, F., Franzo, G., Coffa, S., Polman, A., Bellani, V., Carnera, A., Spinella, C.

MRS - Materials Research Society
6 Conference Proceedings Ion-Assisted Phase Transitions in Silicon

Priolo F., Battaglia A.

Kluwer Academic Publishers
12 Conference Proceedings INFLUENCE OF THE IMPLANTED SPECIES ON THE RESIDUAL DAMAGE AFTER HOT IMPLANTS IN SILICON

Calcagno, L., Spinella, C., Catania, M., Campisano, S.U., Foti, G., Ferla, G., Rimini, E.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12