Blank Cover Image

PLASMA-ACTIVATED ION BEAM REACTIVE SPUTTERING OF NbN THIN FILMS

Author(s):
Publication title:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
128
Pub. Year:
1989
Page(from):
67
Page(to):
72
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990012 [1558990011]
Language:
English
Call no.:
M23500/128
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings USE OF ION SCATTERING SPECTROSCOPY TO MONITOR THE Nb TARGET NITRIDATION DURING REACTIVE SPUTTERING

Lichtenwalner, D.J., Anderson, A.C., Rudman, D.A.

Materials Research Society
7 Conference Proceedings Ion beam sputter deposition of zirconia thin films

W. Jin, C. Jin, L. Liu, H. Zhu, H. Yang

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF Y-Ba-Cu-O THIN FILMS PRODUCED BY ION BEAM SPUTTER DEPOSITION

Chapman, R.C., Auciello, O., Lichtenwalner, D.J., Adu, R.P., Soble II, C.N., Christensen, K.N., Woolcott, Jr., R.R., …

Materials Research Society
8 Conference Proceedings *MICROSTRUCTURAL CHARACTERIZATION OF EPITAXIAL BOTTOM ELECTRODES, BUFFER LAYERS, AND FERROELECTRIC THIN FILMS

Rou, S.H., Graettinger, T.M., Chow, A.F., Soble, II, C.N., Lichtenwalner, D.J., Auciello, O., Kingon, A.I.

Materials Research Society
3 Conference Proceedings ION-BEAM REACTIVE SPUTTER DEPOSITION OF MgO THIN FILMS ON SILICON AND SAPPHIRE SUBSTRATES

Chow, Alice F., Rou, Shang Hsieh, Lichtenwalner, Daniel J., Auciello, Orlando, Kingon, Angus I.

Materials Research Society
9 Conference Proceedings MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING FOR METAL OXIDE THIN FILMS

Xiao, D. Q., Zhu, J. G., Qian, Z. H., Peng, W. B., Wei, L. F., Li, Z. S.

MRS - Materials Research Society
4 Conference Proceedings Effect of Assisted-Ion-Beam Gases on the Structure of Amorphous Silicon Thin Films Prepared by Ion-Beam-Assisted Sputtering

J.J. Huang, C.M. Gui, M. Ding, D.F. Zhao, C.L. Han

Trans Tech Publications
10 Conference Proceedings GROWTH OF TETRAHEDRAL PHASES OF BORON NITRIDE THIN FILMS BY REACTIVE SPUTTERING

Moustakas, T.D., Lei, T., Molnar, R.J., Fountzoulas, C., Oles, E.J.

Materials Research Society
5 Conference Proceedings Ion Beam Reactive Sputter-Deposition of Silicon and Zirconium Oxides

Pringle, S. D., Valizadeh, R., Colligon, J. S., Faunce, C. A., Kheyrandish, H.

MRS - Materials Research Society
11 Conference Proceedings AlN thin films prepared by reactive ion beam coating

Cheng, L. L., Yu, Y. H., Sundaravel, B., Luo, E. Z., Lin, S., Lei, Y. M., Ren. C. X., Cheung, W. Y., Wong, S. P., Xu, J. …

MRS-Materials Research Society
6 Conference Proceedings Vanadium Oxide Thin Films Synthesized by Reactive Ion Beam Sputter Deposition: Influence of Processing Parameters

C. Batista, R.M. Ribeiro, V. Teixeira

Trans Tech Publications
12 Conference Proceedings A Roll-to-Roll Reactive Ion Etching Process for Microtexturing of Polymer Film Surfaces

D.J. McClure

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12