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A HIGH DEPTH RESOLUTION BACKSIDE SECONDARY ION MASS SPECTROMETRY TECHNIQUE USED FOR STUDYING METAL/GaAs CONTACTS

Author(s):
Palmstrom, C.J.
Schwarz, S.A.
Marshall, E.D.
Yablonovitch, E.
Harbison, J.P.
Schwartz, C.L.
Florez, L.
Gmitter, T.J.
Wang, L.C.
Lau, S.S.
5 more
Publication title:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
126
Pub. Year:
1988
Page(from):
283
Page(to):
288
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837968 [0931837960]
Language:
English
Call no.:
M23500/126
Type:
Conference Proceedings

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