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DIFFUSION OF Te OR Zn INTO GaAs FROM DEOPED SiO2 FILMS BY RAPID THERMAL PROCESSING

Author(s):
Kitagawa, A.
Usami, A.
Tokuda, Y.
Wada, T.
Kan, H.
Murakami, T.
1 more
Publication title:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
126
Pub. Year:
1988
Page(from):
65
Page(to):
70
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837968 [0931837960]
Language:
English
Call no.:
M23500/126
Type:
Conference Proceedings

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