Blank Cover Image

ION-BEAM-MODIFIED INTERFACIAL GROWTH OF TUNGSTEN DISILICIDE

Author(s):
Publication title:
Interfacial structure, properties, and design : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
122
Pub. Year:
1988
Page(from):
579
Page(to):
584
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837920 [0931837928]
Language:
English
Call no.:
M23500/122
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THERMAL STABILITY IN THE /TiSi2/TiN/A1 METALLIZATION SYSTEM

Hamdi, A. H., Alvi, N. S., Kermani, A., Al-Kaisi, M.

Materials Research Society
7 Conference Proceedings INITIAL GROWTH OF METASTABLE TITANIUM DISILICIDE AT AMORPHOUS SILICIDE/CRYSTALLINE SILICON INTERFACE

Ma, Z., Allen, L.H., Lee, S.

Materials Research Society
2 Conference Proceedings Modelling Eutectic Growth in Unmodified and Modified Near-Eutectic Al-Si Alloy

N.S. Tiedje, J.H. Hattel, J.A. Taylor, M.A. Easton

Trans Tech Publications
8 Conference Proceedings PRINCIPLES OF ION MIXING*

Matteson, S., Nicolet, M.-A.

North-Holland
3 Conference Proceedings STRAIN AND DAMAGE MEASUREMENTS IN ION IMPLANTED AlXGal-XAs/GaAs SUPERLATTICES

Hamdi, A. H., Tandon, J. L., Vreeland Jr., T., Nicolet, M. A.

Materials Research Society
9 Conference Proceedings Manufacturing Challenges in Advanced Metallization Systems

N.S. Alvi, V.S. Dharmadhikari

Electrochemical Society
4 Conference Proceedings Ion Beam Synthesis of Buried Ion Disilicide

Radermacher K., Mantl S., Apetz R., Dieker C., Luth H.

Kluwer Academic Publishers
10 Conference Proceedings SOLID-PHASE OHMIC CONTACTS TO GaAs WITH TiN DIFFUSION BARRIERS

Kattelus, H. P., tandon, J. L., Hamdi, A. H., Nicolet, M. A.

Materials Research Society
5 Conference Proceedings Properties of ion beam synthesized iron disilicide dots

Galli, M., Marabelli, F., Pagetti, A., Grimaldi, M. G., Coffa, S., Spinella, C., Miglio, L.

MRS-Materials Research Society
11 Conference Proceedings Online characterization of HSG polysilicon by AFM

Ge,L.M., el-Hamdi,M.A., Alvis,R., Sawaya,S., Gifford,D., Lainez,R., Hendrix,L.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings INTERFACIAL REACTIONS OF Mo WITH Al: ION MIXING VERSUS THERMAL ANNEALING

Ma. E., Brunner, A. J., Workman, T. W., Nieh, C. W., Zhao, X. -A., Nicolet, M. -A.

Materials Research Society
12 Conference Proceedings ION IRRADIATION EFFECTS ON PT CONTACTS TO Si WITH AND WITHOUT INTERFACIAL CHEMICAL OXIDE

Banwell, T., Finetti, M., Sani, I., Nicolet, M.-A., Sau, S. S., Scott, D. M.

North-Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12