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THE STRUCTURES OF TANTALUM PENTOXIDE FILM FORMED BY REACTIVE DC MAGNETRON SPUTTER-DEPOSITION OF Ta

Author(s):
Chan, P-H.
Bohlman, J.G.
Liu, H.Y.
Keenan, J.A.
Shen, B.W.
Chen, I-C.
1 more
Publication title:
Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
121
Pub. Year:
1988
Page(from):
549
Page(to):
552
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837913 [093183791X]
Language:
English
Call no.:
M23500/121
Type:
Conference Proceedings

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