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*TAILORED ORGANOMETALLICS AS LOW-TEMPERATURE CVD PRECURSORS TO THIN FILMS

Author(s):
Publication title:
Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
121
Pub. Year:
1988
Page(from):
429
Page(to):
438
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837913 [093183791X]
Language:
English
Call no.:
M23500/121
Type:
Conference Proceedings

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