TRANSITION FROM AMORPHOUS TO CRYSTALLINE SILICON: EFFECT OF HYDROGEN ON FILM GROWTH
- Author(s):
Tsai, C.C. Thompson, R. Doland, C. Ponce, F.A. Anderson, G.B. Wacker, B. - Publication title:
- Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 118
- Pub. Year:
- 1988
- Page(from):
- 49
- Page(to):
- 54
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837883 [093183788X]
- Language:
- English
- Call no.:
- M23500/118
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
TRANSMISSION ELECTRON MICROSCOPY OF HYDROGEN-INDUCED DEFECTS IN LOW TEMPERATURE EPITAXIAL SILICON
Materials Research Society |
2
Conference Proceedings
TEMPERATURE DEPENDENCE OF STRUCTURE, TRANSPORT AND GROWTH OF MICROCRYSTALLINE SILICON: DOES GRAIN SIZE CORRELATE WITH TRANSPORT?
Materials Research Society |
8
Conference Proceedings
LOW TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS USING AN EXCIMER LASER
Materials Research Society |
Trans Tech Publications |
Materials Research Society |
4
Conference Proceedings
GROWTH OF AMORPHOUS MICROCRYSTALLINE, AND EPITAXIAL SILICON IN LOW TEMPERATURE PLASMA DEPOSITION
Materials Research Society |
Trans Tech Publications |
Materials Research Society |
Electrochemical Society |
6
Conference Proceedings
FILM GROWTH MECHANISMS OF AMORPHOUS SILICON IN DIODE AND THE TRIODE GLOW DISCHARGE SYSTEMS
Materials Research Society |
Materials Research Society |