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ION CURRENT, ENERGY DISTRIBUTION, AND RADICAL SPECIES DETECTION IN RF PLASMAS BY CYLINDRICAL MIRROR ANALYZER QUADRUPOLE MASS SPECTROSCOPY

Author(s):
Publication title:
Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
117
Pub. date:
1988
Page(from):
61
Page(to):
66
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837876 [0931837871]
Language:
English
Call no.:
M23500/117
Type:
Conference Proceedings

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