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HETEROEPITAXIAL GROWTH OF Al2O3 THIN FILMS ON Si BY LPCVD

Author(s):
Publication title:
Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
116
Pub. Year:
1988
Page(from):
375
Page(to):
380
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837869 [0931837863]
Language:
English
Call no.:
M23500/116
Type:
Conference Proceedings

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