ENHANCEMENT OF LATERAL SOLID PHASE EPITAXIAL GROWTH OF Si ON SiO2 WITH 31P IMPLANTATION
- Author(s):
- Publication title:
- Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 107
- Pub. Year:
- 1988
- Page(from):
- 507
- Page(to):
- 512
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837753 [0931837758]
- Language:
- English
- Call no.:
- M23500/107
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
The Effects of Rapid Recrystallization and Ion Implanted Carbon on the Solid Phase Epitaxial Regrowth of Si1-xGex Alloy Layers on Silicon
MRS - Materials Research Society |
North-Holland |
8
Conference Proceedings
Epitaxial growth of CuAu-ordered CuInSe2 structural polytypes by migration enhanced epitaxy
MRS-Materials Research Society |
Materials Research Society |
9
Conference Proceedings
MOLECULAR BEAM EPITAXIAL GROWTH OF GaAs ON SILICON WITH BURIED IMPLANTED OXIDES
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
RETARDATION AND ENHANCEMENT IN LATERAL SOLID PHASE EPITAXY OF Si ON SiO2 BY MeV ELECTRON BEAM IRRADIATION
Materials Research Society |
12
Conference Proceedings
Lateral- and Pendeo-epitaxial Growth and Defect Reduction in GaN Thin Films
Trans Tech Publications |