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LARGE DIAMETER SOI WAFERS BY ZONE-MELTING-RECRYSTALLIZATION

Author(s):
Zavracky, P. M.
Vu, D. P.
Allen, L.
Henderson, W.
Guekel, H.
Sniegowski, J. J.
Ford, T. P
Fan, J. C. C.
3 more
Publication title:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
107
Pub. date:
1988
Page(from):
213
Page(to):
220
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837753 [0931837758]
Language:
English
Call no.:
M23500/107
Type:
Conference Proceedings

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