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TOTAL DIELECTRIC ISOLATION (TDI) OF DEVICE ISLANDS USING SIMOX/SOI TECHNOLOGY

Author(s):
Hemment, P. L. F.
Robinson, A. K.
Reeson, K. J.
Davis, J. R.
Kilner, J. R.
Chater, R. J.
Stoemenos, J.
2 more
Publication title:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
107
Pub. Year:
1988
Page(from):
87
Page(to):
92
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837753 [0931837758]
Language:
English
Call no.:
M23500/107
Type:
Conference Proceedings

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