Blank Cover Image

CHARACTERISTICS OF ARSENIC DOPED POLYCRYSTALLINE SILICON-GATE CAPACITORS AFTER RAPID THERMAL PROCESSING

Author(s):
Angelucci, R.
Wong, C. Y.
Sun, J. Y. -C
Scilla, G.
McFarland, P. A.
Megdanis, A. C.
Landi, E.
2 more
Publication title:
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
106
Pub. Year:
1988
Page(from):
285
Page(to):
292
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837746 [093183774X]
Language:
English
Call no.:
M23500/106
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THE NATURE OF ELECTRICALLY INACTIVE IMPLANTED ARSENIC IN SILICON AFTER RAPID THERMAL ANNEALING

Altrip, John L., Evans, Alan G. R., Young, Nigel D., Logan, John R.

Materials Research Society
7 Conference Proceedings STRESS AND MICROSTRUCTURE IN PHOSPHORUS DOPED POLYCRYSTALLINE SILICON

Krulevitch, P., Johnson, G.C., Howe, R.T.

Materials Research Society
2 Conference Proceedings The Characteristics of Hot-Carrier Stressed Bottom-Gate Polycrystalline Silicon Thin-Film Transistors Employing Alternating Magnetic-Field-Enhanced Rapid …

W. Lee, H. Shin, K. Cho, J. Choi, C. Kim

Electrochemical Society
8 Conference Proceedings RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON

Slaoui, A., Hartiti, B., Busch, M. C., Muller, J. C., Siffert, P.

Materials Research Society
3 Conference Proceedings Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films

Baumgart, H., Leamy, H.J., Trimble, L.E., Doherty, C.J., Celler, G.K.

North-Holland
9 Conference Proceedings Partial Transparency Effects of Silicon During Rapid Thermal Processing

Abramson, A. R., Tada, H., Nieva, P., Zavracky, P., Miaoulis, I. N., Wong, P. Y.

MRS - Materials Research Society
4 Conference Proceedings THE EFFECT OF RAPID THERMAL PROCESSING ON THE ELECTRICAL CHARACTERISTICS OF POLYSILICON GATE MOS CAPACITORS

Felch, Susan B., Hodul, David T., Salimian, Mak

Materials Research Society
10 Conference Proceedings Characterization of Light-Emitting Porous Polycrystalline Silicon Films

Poon, M. C., Han, P. G., Sin, J. K. O., Wong, H., Ko, P. K.

MRS - Materials Research Society
5 Conference Proceedings USING RAPID THERMAL PROCESSING TO INDUCE EPITAXIAL ALIGNMENT OF POLYCRYSTALLINE SILICON FILMS ON (100) SILICON

Harrison, H.B., Johnson, S.T., Komem, Y., Wong, C., Cohen, S.

Materials Research Society
11 Conference Proceedings EFFECT OF RAPID THERMAL PROCESSING ON OXYGEN PRECIPITATION IN SILICON

Hawkins, G. A., Lavine, J. P.

Materials Research Society
6 Conference Proceedings THERMAL-RADIATION ABSORPTION CHARACTERISTICS OF PATTERNED WAFERS DURING RAPID THERMAL PROCESSING

Wong, P. Y., Miaoulis, I. N.

MRS - Materials Research Society
12 Conference Proceedings SPECTROSCOPIC INVESTIGATION OF ARSENIC-INDUCED SURFACE DEFECTS IN HIGH-DOSE As+ IMPLANTED RAPID THERMAL ANNEALED SILICON

Kumar, R., Chaussemy, G., Roura, P., Laugier, A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12