DIFFUSION AND SUBSURFACE BONDING OF HYDROGEN IN SILICON
- Author(s):
- Publication title:
- Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 104
- Pub. Year:
- 1988
- Page(from):
- 305
- Page(to):
- 312
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837722 [0931837723]
- Language:
- English
- Call no.:
- M23500/104
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
DIRECT MEASUREMENT OF THE SUBSURFACE HYDROGEN BARRIER LAYER IN PLASMA-TREATED SILICON RIBBON
Materials Research Society |
American Society of Mechanical Engineers |
Materials Research Society |
MRS - Materials Research Society |
Trans Tech Publications |
Materials Research Society |
MRS - Materials Research Society |
Trans Tech Publications |
5
Conference Proceedings
Hydrogen Elastic Recoil Detection Depth Resolution and Sensitivity as a Function of Sample Composition
Trans Tech Publications |
Materials Research Society |
6
Conference Proceedings
Bonding States and Coverage Calculations for HfO2 Deposited on H2O Terminated Si (100)-2x1 Using Atomic Layer Deposition
Electrochemical Society |
Materials Research Society |