HYDROGEN INJECTION INTO p-TYPE SILICON BY CHEMICAL ETCHING
- Author(s):
- Publication title:
- Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 104
- Pub. Year:
- 1988
- Page(from):
- 285
- Page(to):
- 290
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837722 [0931837723]
- Language:
- English
- Call no.:
- M23500/104
- Type:
- Conference Proceedings
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