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THE ELECTRICAL PROPERTIES OF SILICON OXIDE DEPOSITED BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (RPECVD)

Author(s):
Publication title:
Multilayers : synthesis, properties, and non-electronic applications : symposium held December 2-4, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
103
Pub. Year:
1988
Page(from):
121
Page(to):
126
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837715 [0931837715]
Language:
English
Call no.:
M23500/103
Type:
Conference Proceedings

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