Blank Cover Image

BURIED SILICIDE SYNTHESIS AND STRAIN IN COBALT-IMPLANTED SILICON

Author(s):
Publication title:
Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
102
Pub. Year:
1988
Page(from):
371
Page(to):
376
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837708 [0931837707]
Language:
English
Call no.:
M23500/102
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings BURIED SILICIDE SYNTHESIS AND STRAIN IN COBALT-IMPLANTED SILICON

Barbour, J. C., Picrauz, S. T., Doyle, B. L.

Materials Research Society
7 Conference Proceedings ION BEAM SYNTHESIS OF BURIED SINGLE CRYSTAL ERBIUM SILICIDE

Golanski, A., Feenstra, R., Galloway, M.D., Park, J.L., Pennycook, S.J., Harmon, H.E., White, C.W.

Materials Research Society
2 Conference Proceedings ION-BEAM SYNTHESIS OF BURIED YTTRIUM SILICIDE

Alford, T.L., Barbour, J.C.

Materials Research Society
8 Conference Proceedings EVOLUTION OF BURIED COBALT SILICIDE LAYERS FORMED BY Co IMPLANTATION IN Si(111)

Hsieh, Yong-Fen, Hull, Robert, White, Alice E., Short, Ken T.

Materials Research Society
3 Conference Proceedings *SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

White, A. E., Short, K. T., Dynes, R. C., Gibson, J. M., Hull, R.

Materials Research Society
9 Conference Proceedings EPITAXIAL GROWTH OF REFRACTORY SILICIDES ON SILICON

Chen, L. J., Cheng, H. C., Lin, W. T., Chou, L. J., Fung, M. S.

Materials Research Society
4 Conference Proceedings *SYNTHESIS OF BURIED SILICON COMPOUNDS USING ION IMPLANTATION

White, Alice E., Short, K. T., Dynes, R. C., Gibson, J. M., Hull. R.

Materials Research Society
10 Conference Proceedings FORMATION OF COBALT SILICIDES IN ARSENIC IMPLANTED COBALT ON SILICON SYSTEM

Sitaram, A. R., Murarka, S. P.

Materials Research Society
5 Conference Proceedings FRICTION AND WEAR SEDUCTION OF 440C STAINLESS STEEL BY ION IMPLANTATION

Pope, L. E., Yost, F. C., Follstaedt, D. M., Picrauz, S. T., Knapp, J. A.

North-Holland
11 Conference Proceedings FORMATION OF BURIED EPITAXIAL Co SILICIDES BY ION IMPLANTATION

Kohlhof K., Mantl S., Strizker B.

Kluwer Academic Publishers
6 Conference Proceedings STRUCTURE ANALYSIS OF Ni-SILICIDES FORMED IN LATERAL DIFFUSION COUPLES

Chen, S. H., Barbour, J. C., Zheng, L. R., Carter, C. B., Mayer, J. W.

Materials Research Society
12 Conference Proceedings BURIED SILICIDE LAYERS IN SILICON USING WAFER BONDING WITH COBALT AS INTERFACIAL LAYER

K. Ljungberg, A. Söderbärg, G. Thungström, S. Petersson

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12