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RBS/CHANNELING AND TEM ANALYSIS OF HETEROEPITAXIAL Ge FILMS ON GaAs GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Author(s):
Parikh, N. R.
Hattangady, S. V.
Posthill, J. B.
King, M. L.
Rudder, R. A.
Vitkavage, D. J.
Markunas, R. J.
Chu, W. K.
3 more
Publication title:
Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
102
Pub. Year:
1988
Page(from):
275
Page(to):
278
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837708 [0931837707]
Language:
English
Call no.:
M23500/102
Type:
Conference Proceedings

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