MASKLESS ETCHING OF SiO2 BY ION BEAM ASSISTED ETCHING TECHNIQUE

MASKLESS ETCHING OF SiO2 BY ION BEAM ASSISTED ETCHING TECHNIQUE

Author(s):

Publication title:

Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

101

Pub. Year:

1988

Page(from):

477

Page(to):

482

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837692 [0931837693]

Language:

English

Call no.:

M23500/101

Type:

Conference Proceedings

Details

TDL ID:	ZA00015587
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser and particle-beam chemical processing for microelectronics
Conf. info. (Number):	1987
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1987.12.01-1987.12.03

Similar Items:

1 Conference Proceedings MASKLESS FORMATION OF TUNGSTEN FILMS BY ION BEAM ASSISTED DEPOSITION TECHNIQUE Xu, Zheng, Kosugi, Toshihiko, Gamo, Kenji, Namba, Susumu Materials Research Society	7 Conference Proceedings Reactive ion beam etching of multilayer diffraction gratings with SiO₂ as the top layer Y. Liu, X. Xu, Y. Hong, D. Xu, S. Fu Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings MASKLESS PATTERNING OF Cr FILMS USING FOCUSED ION BEAMS Gamo, K., Moriizumi, K., Matsui, T., Namba, S. North-Holland	8 Conference Proceedings CHEMICALLY-ENHANCED GaAS MASKLESS ETCHING USING A NOVEL FOCUSED ION BEAM ETCHING SYSTEM WITH A CHLORINE MOLECULAR AND RADICAL BEAM Takado, N., Asakawa, K., Arimoto, H., Morita, T., Sugata, S., Miyauchi, E., Hashimoto, H. Materials Research Society
3 Conference Proceedings MASKLESS PATTERNING OF Mo AND Si BY FOCUES ION BEAM IMPLANTATION Gamo, Kenji, Yonehara, Katsuyuki, Nagatomo, Shohei, Namba, Susumu Materials Research Society	9 Conference Proceedings Fabrication of InP/SiO2/Si Substrate using Ion-Cuffing Process and Selective Chemical Etching P. Chen, D. Xu, L. Mawst, K. Henttinen, T. Suni, I. Suni, T. Kuech, S. Lau Electrochemical Society
4 Conference Proceedings *RECENT ADVANCES IN THE APPLICATION OF FOCUSED ION BEAMS Gamo, Kenji, Namba, Susumu Materials Research Society	10 Conference Proceedings Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon Takai, M., Sato, Y., Murakami, K., Gamo, K., Minamisono, T., Namba, S. North Holland
5 Conference Proceedings MULTILAYER ANALYSIS BY FOCUSED MeV ION BEAM Takai, M., Kinomura, A., Izumi, M, Matsunaga, K., Inoue, K., Gamo, K., Satou, M., Namba, S. Materials Research Society	11 Conference Proceedings *ELECTRON, ION, AND PHOTON BEAM PROCESSING Gamo, Kenji Materials Research Society
6 Conference Proceedings LASER-ASSITED LOCAL ETCHING OF GALLIUM ARSENIDE Takai, M., Tokuda, J., Nakai, H., Gamo, K., Namba, S. North-Holland	12 Conference Proceedings *LOW ENERGY FOCUSED ION BEAM PROCESSING Gamo, Kenji Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12