Blank Cover Image

MICROSTRUCTURE OF GOLD FILMS GROWN BY ION INDUCED DEPOSITION

Author(s):
Publication title:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
101
Pub. Year:
1988
Page(from):
255
Page(to):
260
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837692 [0931837693]
Language:
English
Call no.:
M23500/101
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THE MICROSTRUCTURE OF GOLD FILMS WRITTEN BY FOCUSED ION BEAM INDUCED DEPOSITION

Blauner, P.G., Ro, J.S., Butt, Y., Thompson, C.V., Melngailis, J.

Materials Research Society
7 Conference Proceedings Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition

D. Patel, Y. Wang, M. Larotonda, J. Lovewell, J. Jensen, K.J. Hsiao, E. Krous, J.J. Rocca, C.S. Menoni, F. Tomasel, S. …

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Focused Ion Beam Induced Deposition

Melngailis J., Dubner D. A., Ro S. J., Shedd M. G., Lezec H.

Martinus Nijihoff Publishers
8 Conference Proceedings THE EFFECT OF DEPOSITION TEMPERATURE ON THE MICROSTRUCTURE OF LPCVD POLYSILICON FILMS

Hangas, J., Liu, D. R., Oei, D. G., McCarthy, S. L., Peters, C.

Materials Research Society
3 Conference Proceedings IN-SITU MEASUREMENT OF ION BEAM INDUCED DEPOSITION OF GOLD

Dubner, A. D., Wagner, A

Materials Research Society
9 Conference Proceedings Nanoscale Electromechanical Phenomena in Ferroelectric Thin Films

Ganpule, C.S., Roytburd, A.L., Stanishevsky, A., Nagarajan, V., Williams, E.D., Ramesh, R., Melngailis, J.

Materials Research Society
4 Conference Proceedings *FOCUSED ION BEAM INDUCED DEPOSITION

Melngailis, John, Blauner, Patricia G.

Materials Research Society
10 Conference Proceedings The Control of Gold Nanocluster Sizes in Dielectric Thin Films via Ion Beam Assisted Deposition

Schiestel, S., Carosella, C.A., hubker, G.K., Qadri, S.B., Knies, D., Stroud, R.M.

Materials Research Society
5 Conference Proceedings SEGREGATION AND TRAPPING OF GOLD DURING ION-INDUCED CRYSTALLIZATION OF AMORPHOUS Si

Poate, J. M., Linnros, J., Priolo, F., Jacobson, D. C., Batstone, J. L., Thompson, M. O.

Materials Research Society
11 Conference Proceedings Influence of a TiN interlayer on the microstructure and mechanical properties of hydroxyapatite films grown by pulsed laser deposition

Nelea,V.D., Ristoscu,C., Colis,S., Arens,S., Pelletier,H., Mihailescu,I.N., Mille,P.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Substrate Heating Measurements in Pulsed Ion Beam Film Deposition

Olson, J. C., Thompson, M. O., Davis, H. A., Rej, D. J., Waganaar, W. J., Tallant, D. R.

MRS - Materials Research Society
12 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si

Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12