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LOW RESISTIVITY CONTACT FORMATION FOR LSI INTERCONNECTION WITH SHORT-PULSE-LASER INDUCED Mo CVD

Author(s):
Uesugi, F.
Morishige, Y.
Shinzawa, T.
Kishida, S.
Hirata, M.
Yamada, H.
Matsumoto, K.
2 more
Publication title:
Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
101
Pub. date:
1988
Page(from):
61
Page(to):
66
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837692 [0931837693]
Language:
English
Call no.:
M23500/101
Type:
Conference Proceedings

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