SOLID PHASE EPITAXY OF IMPLANTED SILICON BY ELECTRON IRRADIATION AT ROOM TEMPERATURE
- Author(s):
- Publication title:
- Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 100
- Pub. Year:
- 1988
- Page(from):
- 375
- Page(to):
- 380
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837685 [0931837685]
- Language:
- English
- Call no.:
- M23500/100
- Type:
- Conference Proceedings
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