DEPOSITION OF a-Ge:H BY GeF4/H2 GLOW DISCHARGE

DEPOSITION OF a-Ge:H BY GeF4/H2 GLOW DISCHARGE

Author(s):

Publication title:

Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

98

Pub. Year:

1987

Page(from):

291

Page(to):

298

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837654 [0931837650]

Language:

English

Call no.:

M23500/98

Type:

Conference Proceedings

Details

TDL ID:	ZA00015584
Series ID:	PA00000011
Conf. info. (Name):	Symposium on plasma processing and synthesis of materials
Conf. info. (Number):	1987
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1987.04.21-1987.04.23

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