INVERSION-TYPE MOS FIELD EFFECT TRANSISTORS USING CVD-GROWN CUBIC SiC ON Si
- Author(s):
- Publication title:
- Novel refractory semiconductors : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 97
- Pub. Year:
- 1987
- Page(from):
- 247
- Page(to):
- 252
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Penn.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837647 [0931837642]
- Language:
- English
- Call no.:
- M23500/97
- Type:
- Conference Proceedings
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