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EPITAXY OF SiC FILMS ON SAPPHIRE BY LASER CVD

Author(s):
Publication title:
Novel refractory semiconductors : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
97
Pub. date:
1987
Page(from):
189
Page(to):
194
Pages:
6
Pub. info.:
Pittsburgh, Penn.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837647 [0931837642]
Language:
English
Call no.:
M23500/97
Type:
Conference Proceedings

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