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HIGH-QUALITY a-Si-BASED ALLOYS: a-SiGe FILMS FABRICATED IN A SUPER CHAMGER AND SURPERLATTICES STRUCTURE a-Si FILMS PREPARED BY A PHOTO-CVD METHOD

Author(s):
Tsuda, S.
Haku, H.
Tarui, H.
Matsuyama, T.
Sayama, K.
Nakashima, Y.
Nakano, S.
Ohnishi, M.
Kuwano, Y.
4 more
Publication title:
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
95
Pub. Year:
1987
Page(from):
311
Page(to):
316
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837623 [0931837626]
Language:
English
Call no.:
M23500/95
Type:
Conference Proceedings

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