Blank Cover Image

POROUS MORPHOLOGY AND OXIDATION KINETICS IN a-Si : H RF SPUTTERED BY He.H2

Author(s):
Shinar, J.
Shinar, R.
Mitra, S.
Albers, M. L.
Shanks, H. R.
Moustakas, T. D.
1 more
Publication title:
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
95
Pub. Year:
1987
Page(from):
183
Page(to):
190
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837623 [0931837626]
Language:
English
Call no.:
M23500/95
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A COMPARATIVE STUDY OF HYDROGENATED AMORPHOUS SILICON FILMS PREPARED BY RF SPUTTERING IN He/H2,, , Ar/H2, AND Xe/H2 MIXTURES

Albers, Mark L., Shanks, H.R., Shinar, J.

Materials Research Society
7 Conference Proceedings Experimental studies of hydrogen motion in hydrogenated amorphous silicon and germanium

Shinar. J, Mitra. S, Wu. L-W, Shinar. R

Kluwer Academic Publishers
2 Conference Proceedings IR AND SIMS STUDY OF HYDROGEN DIFFUSION IN RF SPUTTER DEPOSITED BORON DOPED a-Si:H AND UNDOPED a-Ge:H

Mitra, S., Wu, X.-L, Shinar, R., Shinar, J.

Materials Research Society
8 Conference Proceedings SMALL ANGLE X-RAY SCATTERING (SAXS) AND IR STUDY OF MICROVOID DYNAMICS IN ANNEALED RF SPUTTER-DEPOSITED a-Si:H

Jia, H., Shinar, J., Chen, Y., Williamson, D.L.

Materials Research Society
3 Conference Proceedings Long range atomic H motion in p-doped rf-sputter deposited a-si:H

Mitra. S, Shinar. J

Kluwer Academic Publishers
9 Conference Proceedings SUBSTRATE AND TEMPERATURE DEPENDENT MORPHOLOGY OF rf-SPUTTERED INDIUM NITRIDE FILMS

Kistenmacher, T.J., Dayan, D., Fainchtein, R., Bryden, W.A., Morgan, J.S., Poehler, T.O.

Materials Research Society
4 Conference Proceedings Microstructure and Hydrogen Dynamics in a-Si1.xCx:H

Dalal, V. L., Kavak, H., Mitra, S., Shinar, J., Shinar, R., Williamson, D. L.

Materials Research Society
10 Conference Proceedings "RF magnetron sputtering SiOx, ZnS, and Al2O3 films for capsulation of nanostructured porous silicon"

Monastyrskii,L.S., Kovtun,R.M., Vlasov,A.P., Kostukevych,S.O.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings STABILITY STUDIES ON a-Si:H FILMS

Mitra, S., Wu, X.-L, Shinar, R., Shinar, J.

Materials Research Society
11 Conference Proceedings *LONG RANGE HYDROGEN MOTION, EVOLUTION, AND BONDING IN a-Si:H AND a-Ge:H

Shinar, R., Wu, X.-L., Mitra,. S.

Materials Research Society
6 Conference Proceedings HYDROGEN DYNAMICS AND THE DISTRIBUTION OF H SITES IN UNDOPED a-Si:H AND a-Ge:H

Shinar, R., Wu, X.-L., Mitra, S., Shinar, J.

Materials Research Society
12 Conference Proceedings Resistivity and Microstructure Issues in Indium-Oxide Based Films Grown by RF Magnetron Sputtering on Flexible Polyester Substrates

P.F. Carcia, R.S. McLean, M.H. Reilly, Z.G. Li, L. J. Pillione, R.F. Messier

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12