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PREPARATION OF ALUMINUM NITRIDE AND OXYNITRADE THIN FILMS BY ION-ASSISTED DEPOSITION

Author(s):
Targove, J.. D.
Lingg, L. J.
Lehan, J. P.,
Hwangbo, C. K.
Macleod, H. A.
Leavitt, J. A.
McIntyre Jr., L. C
2 more
Publication title:
Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
93
Pub. Year:
1987
Page(from):
311
Page(to):
316
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837609 [093183760X]
Language:
English
Call no.:
M23500/93
Type:
Conference Proceedings

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