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CHARACTERIZATION OF BURIED-NITRIDE SILICON FOR INTEGRATED CIRCUIT APPLICATIONS

Author(s):
Myers, D. R.
Stein, H., J.
Tsao, S. S.
Arnod, G. W.
Hughes, R. C.
Miller, W. M.
Jones, R. V.
Datye, A. K
3 more
Publication title:
Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
93
Pub. Year:
1987
Page(from):
113
Page(to):
118
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837609 [093183760X]
Language:
English
Call no.:
M23500/93
Type:
Conference Proceedings

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