AN ELECTRICAL CHARACTERIZATION OF SOI FILMS USING DEVICES FORMED BY OXYGEN IMPLANT AND RAPID THERMAL PROCESSING

AN ELECTRICAL CHARACTERIZATION OF SOI FILMS USING DEVICES FORMED BY OXYGEN IMPLANT AND RAPID THERMAL PROCESSING

Author(s):

Publication title:

Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

92

Pub. Year:

1987

Page(from):

241

Page(to):

248

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837593 [0931837596]

Language:

English

Call no.:

M23500/92

Type:

Conference Proceedings

Details

TDL ID:	ZA00015578
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal processing of electronic materials
Conf. info. (Number):	1987
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1987.04.21-1987.04.23

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