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SILICON QUALITY VERSUS THICKNESS FOR NOVEL SILICON ON BORON PHOSPHIDE SOI PROCESS

Author(s):
Publication title:
Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
91
Pub. Year:
1987
Page(from):
381
Page(to):
386
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837586 [0931837588]
Language:
English
Call no.:
M23500/91
Type:
Conference Proceedings

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