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STRESS RELEASE IN ION IMPLANTED LATTICE MISMATCHED SEMICONDUCTOR HETEROSTRUCTURES

Author(s):
Arnold, G.W.
Picraux, S.T.
Myers, D.R.
Doyle, B.L.
Peercy, P.S.
Biefeld, R.M.
Dawson, L.R.
2 more
Publication title:
Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
77
Pub. Year:
1987
Page(from):
417
Page(to):
422
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837562 [0931837561]
Language:
English
Call no.:
M23500/77
Type:
Conference Proceedings

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