*MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
- Author(s):
Horiike, Y. Yoshikawa, R. Okano, H. Nakase, M. Komano, H. Takigawa, T. - Publication title:
- Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 76
- Pub. Year:
- 1987
- Page(from):
- 39
- Page(to):
- 48
- Pages:
- 10
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837425 [0931837421]
- Language:
- English
- Call no.:
- M23500/76
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
SINGLE-CRYSTAL SOLUTION SILICON ETCHING CHARACTERISTICS USING EXCIMER LASER Cl2 GAS
North-Holland |
Materials Research Society |
3
Conference Proceedings
Microfabrication of biofactory-on-a-chip devices using laser ablation technology
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
11
Conference Proceedings
Inspection and printability of programmed defects on reticles for 0.200- and 0.175-μm rule devices
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |