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THE EFFECT OF CHANNEL?PROTECT OXIDE ON LASER RECRYSTALLIZED SILICON?ON-INSULATOR MOS DEVICES

Author(s):
Sritharan, S.
Collins, G.J.
Fukumoto, J.
Szluk, N.
Jones, K.M.
Al?Jassim, M.M.
1 more
Publication title:
Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
74
Pub. date:
1987
Page(from):
621
Page(to):
628
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837401 [0931837405]
Language:
English
Call no.:
M23500/74
Type:
Conference Proceedings

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