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ELIMINATION OF SUBBOUNDARIES IN 0.5-μm-THCK Si-ON-INSULATOR FILMS PRODUCED BY ZMR

Author(s):
Publication title:
Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
74
Pub. date:
1987
Page(from):
567
Page(to):
570
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837401 [0931837405]
Language:
English
Call no.:
M23500/74
Type:
Conference Proceedings

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