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CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS

Author(s):
Publication title:
Electronic packaging materials science II : symposium held April 15-18 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
72
Pub. Year:
1986
Page(from):
331
Page(to):
336
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837388 [0931837383]
Language:
English
Call no.:
M23500/72
Type:
Conference Proceedings

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