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PROPERTIES OF E-BEAM INTERACTIVE OXIDE FILMS

Author(s):
Publication title:
Electronic packaging materials science II : symposium held April 15-18 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
72
Pub. date:
1986
Page(from):
289
Page(to):
296
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837388 [0931837383]
Language:
English
Call no.:
M23500/72
Type:
Conference Proceedings

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