Blank Cover Image

DEEP-LEVELS ASSOCIATED WITH IMPLATED TITANIUM IN SILICON

Author(s):
Publication title:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
71
Pub. Year:
1986
Page(from):
197
Page(to):
202
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837371 [0931837375]
Language:
English
Call no.:
M23500/71
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings DEEP LEVELS ASSOCIATED WITH OXYGEN PRECIPITATION IN CZ SILICON AND CORRELATION WITH MINORITY CARRIER LIFETIMES

Chan, S.S., Varker, C. J., Whitfield, J., Carpenter, R. W.

Materials Research Society
7 Conference Proceedings Identities of the Deep Level Defects E1/E2 in 6H Silicon Carbide

Ling, C.C., Chen, X.D., Gong, M., Weng, H.M., Hang, D.S., Beling, C.D., Fung, S., Lam, T.W., Lam, C.H.

Trans Tech Publications
2 Conference Proceedings MODULATING FUNCTIONS WAVEFORM ANALYSIS OF MULTI-EXPONENTIAL TRANSIENTS FOR DEEP-LEVEL TRANSIENT SPECTROSCOPY

Ransom, C.M., Chappell, T.I., Freeouf, J.L., Kirchner, P.D.

Materials Research Society
8 Conference Proceedings Common deep level in GaN

Wen,T.-C., Lee,S.-C., Lee,W.-J, Guo,J.-D., Feng,M.-S.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings DLTS CHARACTERIZATION OF N-TYPE SILICON AFTER RAPID THERMAL ANNEALING OF BORON IMPLANTATION

Ransom, C.M., Sedgwick, T.O., Cohen, S.

Materials Research Society
9 Conference Proceedings Photoluminescence Study of Deep-Level Defects in Undoped GaN

Reshchikov, M.A., Morkoc, H., Park, S.S., Lee, K.Y.

Materials Research Society
4 Conference Proceedings Electronic states associated with grain boundaries in silicon

Shyu, C.M., Cheng, L.J.

North-Holland
10 Conference Proceedings IDENTIFICATION OF THE CARBON ASSOCIATED RADIATION DAMAGE LEVELS IN SILICON.

FERENCZI,G., LONDOS,C.A., PAVELKA,T., SOMOGYI,M., MERTENS,A.

Trans Tech Publications
5 Conference Proceedings SILICON CONSUMPTION DURING SELF-ALIGNED TITANIUM SILICIDE FORMATION ON SHALLOW JUNCTIONS

Smith, P.L., Osburn, C.M., Wen, D.S., McGuire, G.

Materials Research Society
11 Conference Proceedings SILICON-ON-INSULATOR TECHNOLOGY: OUTLOOK FOR BONDED WAFERS

Iyer, S.S., Sedgwick, T.O., Pitner, P.M., Tejwani, M.J.

Electrochemical Society
6 Conference Proceedings Characteristics of Liquid Phase Deposited Titanium Oxide Films on Silicon and Gallium Arsenide

Lee, M.K., Shih, C.M., Hung, W.H., Lin, S.Y., Cheng, C.C.

Electrochemical Society
12 Conference Proceedings ULTRA THIN SILICON-ON-INSULAR USING EPITAXIAL ETCH STOPS

S.S. Iyer, P.M. Pitner, M.J. Tejwani, T.O. Sedgwick

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12