Blank Cover Image

ON THE QUESTION OF OXYGEN DIFFUSION DURING OXYGEN RELATED THERMAL DONOR FORMATION IN SILICON

Author(s):
Publication title:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
71
Pub. Year:
1986
Page(from):
65
Page(to):
68
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837371 [0931837375]
Language:
English
Call no.:
M23500/71
Type:
Conference Proceedings

Similar Items:

Tan, T.Y., Kleinhenz R., Schneider C.P.

Materials Research Society

Buyanova, I. A., Henry, A., Monemar, B., Lindstrom, J. L., Lamprecht, A., Svensson, B. G., Oehrlein, G. S.

MRS - Materials Research Society

Chen, W.M., Awadelkarim, O.O., Monemar, B., Lindstrom, J.L., Oehrlein, G.S.

Materials Research Society

Singh,S., Prakash,O.

SPIE-The International Society for Optical Engineering

Buyanova,I.A., Henry,A., Monemar,B., Lindstrom,J.L., Sheinkman,M.K., Oehrlein,G.S.

Trans Tech Publications

Ma,Y., Lee,J.L., Benton,J.L., Boone,T., Eaglesham,D.J., Higashi,G.S.

SPIE-The International Society for Optical Engineering

Lindstrom,J.L., Hallberg,T., Aberg,D., Svensson,B.G., Murin,L.I., Markevich,V.P.

Trans Tech Publications

Kaczor,P., Dobaczewski,L., Gregorkiewicz,T., Ammerlaan,C.A.J.

Trans Tech Publications

Gosele, U., Tan,. T. Y.

North-Holland

LEE,S.-T., FFLLINGER,P.

Trans Tech Publications

Aberg,D., Hallberg,T., Svensson,B.G., Lindstrom,J.L., Kleverman,M.

Trans Tech Publications

Brown, A.R., Murray, R., Newman, R.C., Tucker, J.H.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12