Blank Cover Image

APPLICATION OF THE SILICON INTERSTITIAL BASED INTRINSIC GETTERING PROCESS TO THE FORMATION OF MULTILEVEL DEFECT STRUCTURES

Author(s):
Nauka, K.  
Publication title:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
71
Pub. Year:
1986
Page(from):
27
Page(to):
32
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837371 [0931837375]
Language:
English
Call no.:
M23500/71
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ON THE MECHANISM OF INTRINSIC GETTERING BY BUTTERFLY-TYPE DEFECTS IN SILICON

Ueda, O., Nauka, K., Lagowski, J., Gatos, H.C.

Materials Research Society
7 Conference Proceedings EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS

Bae, K-M., Kim, J-R., Hong, Y-K., So, S-I., Lee, S-C., Kim, S-S., Ha, S-W., Koh, C-G., Pyi, S-H., Lee, D-M.

Electrochemical Society
2 Conference Proceedings NATURE AND GENERATION MECHANISM OF BUTTERFLY-TYPE INTRINSIC GETTERING CENTERS IN OXYGEN-FREE SILICON CRYSTALS.

UEDA,O., NAUKA,K., LAGOWSKI,J., GATOS,H.C.

Trans Tech Publications
8 Conference Proceedings EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS

Bae, K-M., Kim, J-R., Hong, Y-K., So, S-I., Lee, S-C., Kim, S-S., Ha, S-W., Koh, C-G., Pyi, S-H., Lee, D-M.

Electrochemical Society
3 Conference Proceedings INTERNAL GETTERING IN OXYGEN-FREE SILICON

Nauka, K., Lagowski, J., Gatos, H. C.

Materials Research Society
9 Conference Proceedings Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon

Brown, R. A., Kononchuk, O., Radzimski, Z., Rozgonyi, G. A., Gonzalez, F.

MRS - Materials Research Society
4 Conference Proceedings Precipitation of oxygen and intrinsic gettering in silicon

Tice, W.K., Tan, T.Y.

North Holland
10 Conference Proceedings Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon

Brown, R. A., Kononchuk, O., Radzimski, Z., Rozgonyi, G. A., Gonzalez, F.

MRS - Materials Research Society
5 Conference Proceedings ON THE INTERACTION OF INTRINSIC AND EXTRINSIC GETTERING SCHEMES IN SILICON

Yang, K. H., Tan, T. Y.

Materials Research Society
11 Conference Proceedings Intrinsic Point Defects and Diffusion Processes in Silicon

Tan, T. Y.

North-Holland
6 Conference Proceedings Gettering of Interstitial Iron in P/P+ Epitaxial Silicon Wafers

Wijaranakula, W., Gao, X., Curtis, K., Haddad, H.

MRS - Materials Research Society
12 Conference Proceedings MICROSCOPIC ANALYSIS OF THE BEHAVIOR OF INTERSTITIAL AND PRECIPITATED OXYGEN DURING INTRINSIC GETTERING IN Si

Sun, Q., Lagowski, J., Gatos, H. C.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12