Blank Cover Image

HYDROGENATED AMORPHOUS SILICON THIN-FILM DEPOSITION BY DIRECT PHOTO-ENHANCED DECOMPOSITION OF SILANE USING AN INTERNAL HYDROGEN DISCHARGE LAMP

Author(s):
Publication title:
Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
70
Pub. Year:
1986
Page(from):
31
Page(to):
36
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837364 [0931837367]
Language:
English
Call no.:
M23500/70
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PHOTOENHANCED DEPOSITION OF SILICON OXIDE THIN FILMS USING AN INTERNAL NITROGEN DISCHARGE LAMP

Robertson, P.A., Milne, W.I.

Materials Research Society
7 Conference Proceedings PHOTO INDUCED DEPOSITION OF THIN SILICON DIOXIDE FILMS USING A NOVEL LARGE AREA EXCIMER LAMP

Patel, P., Kogelschatz, U., Bergonzo, P., Boyd, I. W.

Materials Research Society
2 Conference Proceedings AMORPHOUS HYDROGENATED SILICON THIN FILM TRANSISTORS MANUFACTURED BY A PHOTO-CVD TECHNIQUE

Baker, S.D., Milne, W.I., Robertson, P.A.

Materials Research Society
8 Conference Proceedings THE DIRECT PHOTO-CVD OF SILICON DIOXIDE FROM Si2M6 AND N2O3

Bhatnagar, Yashraj K., Milne, W.I.

Materials Research Society
3 Conference Proceedings REDUCTION OF THRESHOLD VOLTAGE SHIFT BY BIAS ANNEALING OF HYDROGENATED AMORPHOUS SILICON THIN FILM TRANSISTORS

Deane, S.C., Milne, W.I., Powell, M.J.

Materials Research Society
9 Conference Proceedings Scanning Tunneling Microscopy Study of the Growth Mechanism for Hydrogenated Amorphous Silicon Produced by Plasma Enhanced Chemical Vapor Deposition

Flewitt, A. J., Milne, W. I., Robertson, J., Stephenson, A. W., Welland, M. E.

MRS - Materials Research Society
4 Conference Proceedings A NEW MODEL FOR THE POLY-SILICON THIN FILM TRANSISTOR FOR USE WITH SPICE

Izzard, M.J., Migliorato, P., Milne, W.I.

Materials Research Society
10 Conference Proceedings Tetrahedrally Bonded Amorphous Carbon for Use in Thin Film Transistors*

Milne, W.I., Clough, F.J., Kleinsorge, B., Maeng, S.L., Uchikoga, S., Robertson, J.

Electrochemical Society
5 Conference Proceedings ECR-PECVD of Silicon Nitride and Hydrogenated Amorphous Silicon at 80℃ For TFTs

Flewitt, A.J., Dyson, A.P., Robertson, J., Milne, W.I.

Electrochemical Society
11 Conference Proceedings Mechanisms for Defect Creation and Removal in Hydrogenated and Deuterated Amorphous Silicon Studied using Thin Film Transistors

Andrew J. Flewitt, Shufan Lin, William I. Milne, Ralf B. Wehrspohn, Martin J. Powell

Materials Research Society
6 Conference Proceedings Hydrogenated Amorphous Silicon And Silicon Nitride Deposited At Less Than 100°C By ECR-PECVD For Thin Film Transistors

Dyson, A. P., Flewitt, A. J., Milne, W. I., Robertson, J.

Materials Research Society
12 Conference Proceedings CARBON-SILICON HETEROJUNCTION DIODES FORMED BY CH4/Ar RF PLASMA THIN FILM DEPOSITION ON Si SUBSTRATES

Amaratunga, G.A.J., Milne, W.I., Putnis, A., Chan, K.K., Clay, K.J., Welland, M.E.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12