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REACTIVE DEPOSITION OF a-SILICON AND Si-BASED ALLOYS

Author(s):
Hanna, J.
Oda, S.
Shirai, H.
Miyauchi, A.
Tanabe, A.
Fukuda, K.
Ohtoshi, T.
Tokuhiro, O.
Nguyen, H.
Shimizu, I.
5 more
Publication title:
Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
70
Pub. Year:
1986
Page(from):
11
Page(to):
24
Pages:
14
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837364 [0931837367]
Language:
English
Call no.:
M23500/70
Type:
Conference Proceedings

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