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CHARACTERIZATION OF THIN FILM DIELECTRICS BY FTIRS

Author(s):
Cox, J.N.  
Publication title:
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
69
Pub. Year:
1986
Page(from):
219
Page(to):
224
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837357 [0931837359]
Language:
English
Call no.:
M23500/69
Type:
Conference Proceedings

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