Blank Cover Image

THREE DIMENSIONAL CHARACTERIZATION OF INTERFACES IN SEMICONDUCTORS BY SCANNING ELECTRON MICROSCOPY

Author(s):
Publication title:
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
69
Pub. Year:
1986
Page(from):
171
Page(to):
176
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837357 [0931837359]
Language:
English
Call no.:
M23500/69
Type:
Conference Proceedings

Similar Items:

Twigg, M.E., Chu, S.N.G., Joy, D.C., Maher, D.M., Macrander, A.T., Nakahara, S., Chin, A.K.

Materials Research Society

Li, D., Otsuka, N., Qiu, J., Glenn, Jr., J., Kobayashi, M., Gunshor, R.L.

Materials Research Society

Maher, D.M., Knoell, R.V., Ellington, M.B., Hull, R., Jacobson, D.C., Joy, D.C.

Materials Research Society

Hull, R., Twigg, M.E., Bean, J.C., Gibson J.M., Joy, D.C.

Materials Research Society

3 Conference Proceedings Low vacuum microscopy for mask metrology

Joy, D.C.

SPIE - The International Society of Optical Engineering

Farrow,R.C., Mkrichyan,M.M., Bolen,K., Blakey,M., Biddick,C., Fetter,L.A., Huggins,H.A., Tarascon,R.G., Berger,S.D.

SPIE-The International Society for Optical Engineering

Csencsits,R., Gruen,D.M., Krauss,A.R., Zuiker,C.D.

SPIE-The International Society for Optical Engineering

Hietschold,M., Muller,A.-D., Muller,F.

SPIE-The International Society for Optical Engineering

Chen, Y.L., Bentley, J., Wang, C., Lucovsky, G., Maher, D.M.

Materials Research Society

J. Wilson, W. Kobsiriphat, R. Mendoza, H. Chen, T. Hines, I. Hiller, D. Miller, K. Thornton, P. Voorhees, S. Adler, D. …

Electrochemical Society

Rai, R.S., Tartaglia, J.M., Quinn, W.E., Martel, D.C.

Materials Research Society

Wiltshire,T.J., Kirk,J.P., Wheeler,D.C., Obszarny,C., Marsh,J.T., Odiwo,D.M.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12