Blank Cover Image

DEPOSITION OF ALUMINUM NITRIDE FILMS USING RF REACTIVE SPUTTERING

Author(s):
Publication title:
Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
68
Pub. Year:
1986
Page(from):
357
Page(to):
366
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837340 [0931837340]
Language:
English
Call no.:
M23500/68
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PREPARATION OF BORON NITRIDE FILMS BY RF REACTIVE SPUTTERING

Banerjee, P. K., Chaterjee, B., Kim, J. S., Mitra, S. S.

Materials Research Society
7 Conference Proceedings Growth and Characterization of Hard Nitrides Films Prepared by Pulsed Laser Deposition

Inturi, R. B., Kumar, Ashok, Ekanayake, U., Shu, N., Barnard, J. A.

MRS - Materials Research Society
2 Conference Proceedings Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering

N. Saoula, K. Henda, R. Kesri

Trans Tech Publications
8 Conference Proceedings Structure and Mechanical Properties of Titanium Nitride, Zirconium Nitride, and Chromium Nitride Films by Reactive Magnetron-Sputter Deposition

Soe, W-H., Kitagaki, T., Ueda, H., Shima, N., Otsuka, M., Yamamoto, R.

MRS - Materials Research Society
3 Conference Proceedings DEPOSITION OF ALUMINUM NITRIDE FILM BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING

Huang, R. F., Wen, L. S., Wang, H., Wu, J., Hong, R. J.

Materials Research Society
9 Conference Proceedings Thermal and Thermoelectric Properties of III-Nitride and III-Oxynitride Films Prepared by Reactive RF Sputtering

Izaki, R., Kaiwa, N., Sugimura, S., Yamaguchi, S, Yamamoto, A.

Materials Research Society
4 Conference Proceedings HYDROGEN IN RF REACTIVE MAGNETRON SPUTTER SILICON NITRIDE FILMS

Lin, Chi-Hsien, Wachtman, J.B., Sigel, G.H., Pfeffer, R.L., Monahan, T.P., Lareau, R.T.

Materials Research Society
10 Conference Proceedings LASER CHEMICAL VAPOR DEPOSITION OF TiN FILMS

Chen, B., Biunno, N., Singh, R.K., Narayan, J.

Materials Research Society
5 Conference Proceedings RF MAGNETRON SPUTTER DEPOSITION AND CHARACTERIZATION OF ALUMINUM NITRIDE THIN FILMS

Krupanidhi, Saluru B

Materials Research Society
11 Conference Proceedings Morphology and Dielectric Properties of Reactively-Sputtered Aluminum Nitride Thin Films

Randolph, A. G., Kurinec, S. K.

MRS - Materials Research Society
6 Conference Proceedings Silicon Oxide and Silicon Nitride Thin Film Deposition using RF Magnetron Sputtering

Kumar,Mahesh, Ahmad,S., George,P.J., Yadav,M.S.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H., Morton, S. A., Charnock, J. M., MacLean, E. J., Brown, N. M. D.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12