OPTICAL EMISSION SPECTROSCOPY, LASER INDUCED FLOURESCENCE, AND MASS SPECTROMETRY STUDIES OF SILANE, DISILANE, AND CHALOROSILANE PLASMAS

OPTICAL EMISSION SPECTROSCOPY, LASER INDUCED FLOURESCENCE, AND MASS SPECTROMETRY STUDIES OF SILANE, DISILANE, AND CHALOROSILANE PLASMAS

Author(s):

Publication title:

Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

68

Pub. Year:

1986

Page(from):

149

Page(to):

156

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837340 [0931837340]

Language:

English

Call no.:

M23500/68

Type:

Conference Proceedings

Details

TDL ID:	ZA00015554
Series ID:	PA00000011
Conf. info. (Name):	Symposium on plasma processing
Conf. info. (Number):	1986
Conf. info. (Venue):	Palo Alto, CA, USA
Conf. info. (Date):	1986.04.15-1986.04.18

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