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SURFACE MODIFICATION OF SiC BY ION IMPLANTATION

Author(s):
Wood, Susan
Spitsnagel, J.A.
Choyke, W.L.
Bradshaw, J.
Greggi, J. Jr.
Doyle, N.J.
1 more
Publication title:
Defect properties and processing of high-technology nonmetallic materials : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
60
Pub. Year:
1986
Page(from):
459
Page(to):
468
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837258 [0931837251]
Language:
English
Call no.:
M23500/60
Type:
Conference Proceedings

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